Compensation table formation using two separate meteorology systems

Dear All,

We are using a PMAC system to control a 2 axis machine. Currently we are using 1D laser interferometer for Following error (FE) measurement along each axis separately and using 1D compensation table we are compensating the axis FE. Not we want to compensate the perpendicularity error between both axis. So how to form a compensation table which can accommodate for both FE and cross axis error of one single axis and how to use the 2D compensation table.

 

Thanks in advance.

 

 

Dear All,

We are using a PMAC system to control a 2 axis machine. Currently we are using 1D laser interferometer for Following error (FE) measurement along each axis separately and using 1D compensation table we are compensating the axis FE. Not we want to compensate the perpendicularity error between both axis. So how to form a compensation table which can accommodate for both FE and cross axis error of one single axis and how to use the 2D compensation table.

 

Thanks in advance.

 

 

 

Raghav,

 

Read the section "position compensation table" on page 183 of Turbo User Manual. This has an example for 2D compensation. here is the link to the manual:

 

http://www.deltatau.com/manuals/pdfs/TURBO%20PMAC%20USER%20MANUAL.pdf?id=634562645871162165

Alternately, if you are compensating for a "pure" perpendicularity error, where the angle between the two motors is the same over all positions (or at least close enough that this is a good approximation), you can keep your 1D compensation tables for each motor, and do the perpendicularlity correction in the axis definitions for the coordinate system. The User's Manual chapter on setting up coordinate systems shows the example of correction for a 1 arc-minute perpendicularity error.